Thermal stability of Al2O3/TiO2 stacks for boron emitter passivation on n-type silicon solar cells

Title
Thermal stability of Al2O3/TiO2 stacks for boron emitter passivation on n-type silicon solar cells
Authors
Keywords
Passivation, Silicon solar cells, Alumina, Titania, Thermal stability, Atomic layer deposition
Journal
THIN SOLID FILMS
Volume 669, Issue -, Pages 60-64
Publisher
Elsevier BV
Online
2018-10-24
DOI
10.1016/j.tsf.2018.10.030

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