Microstructured SiOx thin films deposited from hexamethyldisilazane and hexamethyldisiloxane using atmospheric pressure thermal microplasma jet

Published 2018 View Full Article

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Title
Microstructured SiOx thin films deposited from hexamethyldisilazane and hexamethyldisiloxane using atmospheric pressure thermal microplasma jet
Authors
Keywords
Atmospheric pressure microplasma, Silicon oxide, Thin film, Microstructure
Journal
THIN SOLID FILMS
Volume 669, Issue -, Pages 321-328
Publisher
Elsevier BV
Online
2018-11-08
DOI
10.1016/j.tsf.2018.11.012

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