Journal
SURFACE ENGINEERING
Volume 36, Issue 1, Pages 49-54Publisher
TAYLOR & FRANCIS LTD
DOI: 10.1080/02670844.2018.1555214
Keywords
ZnO; thin films; RF magnetron sputtering; pure metallic Zn target; ZnO ceramic target
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In this work, ZnO thin films was deposited onto Si substrate by ablation of different sputtering targets (ZnO ceramic target and pure metallic Zn target) under different substrate temperatures from 300 degrees C to 600 degrees C with intervals of 100 degrees C, and the properties of ZnO thin films were analysed. The results showed that ZnO thin films had the c-axis preferred orientation and it also presented optimised properties owing to the reduction of thin film defects at a substrate temperature of 400 degrees C. By analysing data, it could also be seen that the performance of ZnO thin films fabricated using the ZnO ceramic target was better than that of ZnO thin films fabricated using the pure metallic Zn target. It was considered that the excellent properties of ZnO thin films fabricated using the ZnO ceramic target were attributed to the decrease in oxygen vacancies and the reduction of film defects.
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