Improvement of contact resistance in flexible a-IGZO thin-film transistors by CF4/O2 plasma treatment

Title
Improvement of contact resistance in flexible a-IGZO thin-film transistors by CF4/O2 plasma treatment
Authors
Keywords
a-IGZO, Flexible electronics, Thin-film transistor, Contact resistance, Plasma treatment, CF, 4
Journal
SOLID-STATE ELECTRONICS
Volume 150, Issue -, Pages 23-27
Publisher
Elsevier BV
Online
2018-10-06
DOI
10.1016/j.sse.2018.10.002

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