Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors

Title
Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors
Authors
Keywords
Au/SnO, 2, :NiO thin films, Heterostructure, Self-assembly, NO, 2, gas detection, Thermal annealing, Fermi level
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 278, Issue -, Pages 28-38
Publisher
Elsevier BV
Online
2018-09-19
DOI
10.1016/j.snb.2018.09.074

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