XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films

Published 2018 View Full Article

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Title
XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2018-11-10
DOI
10.1088/1361-6641/aaef9f

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