Note: A 3D-printed flexure nanostage driven by piezo buzzers

A flexure nanostage capable of being manufactured at home at a low cost is proposed. A prototype of the said stage-fabricated using a three-dimensional (3D) printer-exhibited single degree-of-freedom motion. Limitations with regard to material, fabrication precision, and actuator force were overcome, and cross talk was reduced by designing flexure holes. Fabrication of such holes was exclusively facilitated by the use of 3D-printing technology. Experimental results demonstrate that the proposed stage can perform linear motion over a 10-mu m distance over a voltage range of 30 V. Published by AIP Publishing.