Energetic Ions during Plasma-Enhanced Atomic Layer Deposition and their Role in Tailoring Material Properties

Published 2018 View Full Article

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Title
Energetic Ions during Plasma-Enhanced Atomic Layer Deposition and their Role in Tailoring Material Properties
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2018-11-22
DOI
10.1088/1361-6595/aaf2c7

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