Precision grinding of silicon nitride ceramic with laser macro-structured diamond wheels

Title
Precision grinding of silicon nitride ceramic with laser macro-structured diamond wheels
Authors
Keywords
Laser macro-structured, Grinding force, Grinding temperature, Subsurface damage
Journal
OPTICS AND LASER TECHNOLOGY
Volume 109, Issue -, Pages 418-428
Publisher
Elsevier BV
Online
2018-08-23
DOI
10.1016/j.optlastec.2018.08.021

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