Application of keV-energy proton scattering for thin film analysis

Published 2018 View Full Article

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Title
Application of keV-energy proton scattering for thin film analysis
Authors
Keywords
Low energy ion scattering, Proton scattering, Surface analysis, Thin films, Nanoelectronics
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 438, Issue -, Pages 54-57
Publisher
Elsevier BV
Online
2018-11-06
DOI
10.1016/j.nimb.2018.10.043

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