Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 89, Issue -, Pages 110-115Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2018.08.031
Keywords
Quasi-one dimension; UV photodetector; Two-step growth; Diamond; CVD
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Funding
- National Natural Science Foundation of China [61627812]
- Science and Technology Coordinating Innovative Engineering Projects of Shaanxi Province [2016KTZDGY02-03]
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In this study, we report ultraviolet photoresponse enhancement of diamond photodetector by applying patterned diamond film design and two-step growth process. Diamond stripes are fabricated on the surface and interdigitated electrodes are set perpendicular to them. Before second step growth, surface defects induced during etching process affect the responsivity of supra-band gap light. After second step growth, the surface defects are suppressed, then the responsivity of photodetector on diamond strips are larger than that of photodetector on continuous diamond film. The larger responsivity could be attributed to the quasi-one-dimensional carrier transport and large surface to volume ratio. In additionally, a large electrode space is helpful in enhancing ultraviolet photoresponse while suppressing the visible response.
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