Enhanced thermal stability by heterogeneous interface and columnar grain in nanoscale Cu/Ru multilayers

Title
Enhanced thermal stability by heterogeneous interface and columnar grain in nanoscale Cu/Ru multilayers
Authors
Keywords
Multilayers, Thermal stability, Heterogeneous interface, Columnar grain, Grain growth
Publisher
Elsevier BV
Online
2018-11-02
DOI
10.1016/j.msea.2018.10.048

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