Article
Chemistry, Inorganic & Nuclear
Antti-Jussi Kallio, Alexander Weiss, Rene Bes, Mikko J. Heikkila, Mikko Ritala, Marianna Kemell, Simo Huotari
Summary: This study presents laboratory-scale X-ray absorption spectroscopy used in the research of nanometer-scale thin films. The Cu K edge X-ray absorption near edge structure (XANES) and extended X-ray absorption fine structure (EXAFS) of CuI and CuO thin films grown with atomic layer deposition are demonstrated. The thicknesses of the investigated samples range from 12 to 248 nm. The study also proves the capability of laboratory-based XAS for in situ measurements on thin films.
DALTON TRANSACTIONS
(2022)
Article
Multidisciplinary Sciences
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, Masaru Hori
Summary: This study developed a method of dry etching TiAlC by transferring from wet etching to dry etching using a floating wire-assisted Ar/ammonium hydroxide vapor plasma. The proposed mechanism involves the formation of volatile products from the modified layer during the dry etching of TiAlC.
SCIENTIFIC REPORTS
(2022)
Article
Optics
Hyeongsu Choi, Namgue Lee, Hyunwoo Park, Yeonsik Choi, Hyunwoo Yuk, Junghoon Lee, Sung Gwon Lee, Eun Jong Lee, Hyeongtag Jeon
Summary: The electronic band structure of Zn(O,S) films was investigated by depositing films with different ZnO/ZnS cycle ratios to achieve an ideal flat CBO matching with the SnS absorber layer.
Article
Chemistry, Multidisciplinary
Keun Yong Lim, Hong Hee Kim, Ji Hyun Noh, So Hyun Tak, Jae-Woong Yu, Won Kook Choi
Summary: A triple-layered structure of a-SiNx:H/SiOxNy/hybrid SiOx (ASH) thin film encapsulation (TFE) method was performed on QD-LEDs using reproducible PECVD and dip-coating processes. The ASH films exhibited high transmittance and low water vapor transmission rate. The ASH films also demonstrated comparable performance to glass lid encapsulation in extending the lifetime of QD-LEDs.
Article
Nanoscience & Nanotechnology
Jorge Luis Vazquez, Javier Lopez, Carolina Bohorquez, Eder Lizarraga, Eduardo Blanco, Bonifacio Can-Uc, Oscar Romo, Nicola Nedev, Mario H. Farias, Hugo Tiznado
Summary: This research investigates the improvements of ozone annealing on the optical and etching characteristics of TiO2/Al2O3 multilayer band-pass filters. Ozone annealing increases the optical transmittance of the multilayers by approximately 40% without significant spectral changes. It also enhances the stability of TiO2 against wet etching, improving the uniformity of etched surfaces.
ACS APPLIED MATERIALS & INTERFACES
(2023)
Article
Engineering, Electrical & Electronic
Soo-Hyun Bae, Hyun-Joo Ryoo, Jong-Heon Yang, Yong-Hae Kim, Chi-Sun Hwang, Sung-Min Yoon
Summary: The study found that increasing the indium content in the channel composition of In-Ga-Zn-O (IGZO) thin-film transistors can significantly reduce the effective channel length and lead to a decrease in drain bias-dependent turn-on voltages. Additionally, the channel composition has a significant impact on the drain-induced barrier-lowering (DIBL) coefficient, possibly due to inter-diffusion and redox reactions at interfaces.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Multidisciplinary Sciences
Yiming Chen, Chi Chen, Chen Zheng, Shyam Dwaraknath, Matthew K. Horton, Jordi Cabana, John Rehr, John Vinson, Alan Dozier, Joshua J. Kas, Kristin A. Persson, Shyue Ping Ong
Summary: The study reports the development of a database of computed L-edge XANES using FEFF9 code based on multiple scattering theory, aiming to address the research community's need for L-edge XANES spectra.
Article
Materials Science, Multidisciplinary
Pi-Chun Juan, Kuei-Chih Lin, Wen-Hao Cho, Chi-Chung Kei, Wei-Hsuan Hung, Hao-Pin Shi
Summary: Molybdenum oxide thin films were synthesized using plasma-enhanced atomic layer deposition, and the effect of plasma power on film structure was investigated. The film structure changed from orthorhombic phase to metastable monoclinic phase as the plasma power increased. Different grain morphologies were observed at different power levels, and the interfacial layer thickness was thinner at low powers. X-ray diffraction confirmed the presence of only +6 oxidation state of Mo in the films.
MATERIALS CHEMISTRY AND PHYSICS
(2022)
Article
Engineering, Electrical & Electronic
Seo-Hyun Moon, Soo-Hyun Bae, Young Ha Kwon, Nak-Jin Seong, Jong-Heon Yang, Yong-Hae Kim, Kyu-Jeong Choi, Chi-Sun Hwang, Sung-Min Yoon
Summary: By controlling the type of oxidants and the indium contents in the ALD process, the performance of IGZO thin-film transistors can be significantly improved, particularly in terms of carrier mobility. Different oxidants and In/Ga ratios can adjust the physical properties of Al2O3 PL and GI, leading to enhanced device performance.
ACS APPLIED ELECTRONIC MATERIALS
(2021)
Article
Engineering, Environmental
Mu Liu, Xiaolei Bao, Fahao Ma, Minrui Wang, Liren Zheng, Zeyan Wang, Peng Wang, Yuanyuan Liu, Hefeng Cheng, Ying Dai, Yuchen Fan, Zhaoke Zheng, Baibiao Huang
Summary: The use of supercycle ALD technology has led to superior performance and stability for the TiO2@Cu system during CO2 reduction reaction, which was previously unattainable by traditional post-deposition TiO2 methods. This study has demonstrated a promising approach for enhancing the potential of ALD technique in the field of photocatalysis.
CHEMICAL ENGINEERING JOURNAL
(2022)
Article
Chemistry, Physical
Seungwon Park, Myoungsub Kim, Tae Hyun Kim, Minkyu Lee, Seunggyu Na, Inkyu Sohn, Taehoon Kim, Taeyoon Lee, Seung-min Chung, Hyungjun Kim
Summary: This study developed a thermal atomic layer deposition process for ternary Ge-S-Se alloys, which exhibited excellent electrical characteristics and film properties for future vertical cross-point structures.
JOURNAL OF ALLOYS AND COMPOUNDS
(2023)
Article
Materials Science, Coatings & Films
Kamesh Mullapudi, Nishit M. Murari, Ryan H. Mansergh, Douglas A. Keszler, John F. Conley
Summary: This work demonstrates controlled area-selective deposition of aluminum oxide phosphate (AlPO) at room temperature and near atmospheric pressure using a potentially zero-waste aerosol jet fog (ajFOG) deposition system. The process involves coating Octyl-trichlorosilane (OTS-8) self-assembled monolayers (SAMs) on SiO2/Si substrates, forming hydrophobic and hydrophilic regions through ultraviolet/ozone exposure, and selectively depositing AlPO onto the hydrophilic regions. Smooth films with sharp boundaries are achieved, with investigation into features and defects as a function of various parameters.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2021)
Article
Chemistry, Multidisciplinary
Muhammad Farooq Khan Niazi, David Munoz-Rojas, Damien Evrard, Matthieu Weber
Summary: With increasing concerns about environmental impacts, novel nanotechnologies and nanomaterials are being explored as solutions to pollution. This study compares the environmental performance of conventional atomic layer deposition (ALD) and spatial ALD (SALD), finding that SALD generally performs better in most assessed impact categories.
ACS SUSTAINABLE CHEMISTRY & ENGINEERING
(2023)
Article
Nanoscience & Nanotechnology
Yujin Jo, Yong Tae Kim, Hoonsung Cho, Min-Kyung Ji, Jaeyeong Heo, Hyun-Pil Lim
Summary: The study aimed to create a uniform zirconia layer on complex structures using atomic layer deposition (ALD). The results showed that zirconia coatings via ALD reduced bacterial adhesion and increased osteoblast cell viability, indicating the potential for reducing peri-implantitis and improving osseointegration on implant surfaces.
INTERNATIONAL JOURNAL OF NANOMEDICINE
(2021)
Article
Materials Science, Multidisciplinary
Hyun-Min Ahn, Young-Ha Kwon, Nak-Jin Seong, Kyu-Jeong Choi, Chi-Sun Hwang, Sung-Min Yoon
Summary: The effect of modifying active layer geometry and controlling active channel composition on a vertical-channel thin-film transistor (VTFT) was investigated, resulting in significant improvements in the on/off ratio and field-effect mobility. The modifications led to the elimination of uncontrolled current paths and increased In/Ga ratio, resulting in higher on-state current and improved field-effect mobility.
ELECTRONIC MATERIALS LETTERS
(2022)
Article
Engineering, Mechanical
N. Razavi, P. Ferro, F. Berto, J. Torgersen
THEORETICAL AND APPLIED FRACTURE MECHANICS
(2018)
Article
Engineering, Mechanical
N. Razavi, F. Berto, M. Peron, J. Torgersen
THEORETICAL AND APPLIED FRACTURE MECHANICS
(2018)
Article
Chemistry, Physical
Seyed Mohammad Javad Razavi, Giancarlo G. Bordonaro, Paolo Ferro, Jan Torgersen, Filippo Berto
Article
Chemistry, Physical
Mirco Peron, Jan Torgersen, Filippo Berto
Article
Engineering, Mechanical
Mirco Peron, Jan Torgersen, Paolo Ferro, Filippo Berto
THEORETICAL AND APPLIED FRACTURE MECHANICS
(2018)
Article
Chemistry, Physical
Mirco Peron, Jan Torgersen, Filippo Berto
Article
Chemistry, Physical
Orlando Trejo, Anup L. Dadlani, Francisco De La Paz, Shinjita Acharya, Rob Kravec, Dennis Nordlund, Ritimukta Sarangi, Fritz B. Prinz, Jan Torgersen, Neil P. Dasgupta
CHEMISTRY OF MATERIALS
(2019)
Review
Materials Science, Multidisciplinary
Kristin S. Odegaard, Jan Torgersen, Christer W. Elverum
Article
Metallurgy & Metallurgical Engineering
Mirco Peron, Susanna Cogo, Maria Bjelland, Abdulla Bin Afif, Anup Dadlani, Elisa Greggio, Filippo Berto, Jan Torgersen
Summary: The study investigates the corrosion behavior and biological response of ALD TiO2, HfO2, and ZrO2 coatings on AZ31 alloy. Results indicate improved corrosion resistance and cytotoxicity of all three coatings, with HfO2 showing the highest performance in terms of corrosion resistance and cell viability.
JOURNAL OF MAGNESIUM AND ALLOYS
(2021)
Article
Engineering, Biomedical
Kristin S. Odegaard, Lingzi Ouyang, Qianli Ma, Glenn Buene, Di Wan, Christer W. Elverum, Jan Torgersen, Therese Standal, Marita Westhrin
Summary: This study demonstrates the positive impact of electron-beam additive manufacturing scaffolds on bone growth. By culturing bone marrow-derived mesenchymal stromal cells (BMSCs) on these scaffolds, it is found that the scaffolds can promote osteogenic differentiation of the cells and increase bone matrix development.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE
(2021)
Article
Materials Science, Multidisciplinary
Stephanie Burgmann, Markus Lid, Settasit Chaikasetsin, Dag Skjerven Bjordal, Fritz Prinz, John Provine, Filippo Berto, Antonius T. J. van Helvoort, Jan Torgersen
Summary: In this study, vapor hydrofluoric processes were used to release 3D shell structures made of atomic-layer-deposited Al2O3 etch-stop layers. The fabricated membranes had heights of 100-600 nm and widths of 1-200 nm. The results showed that high aspect ratios could be achieved within a certain range, but the etch rate stagnated when the HF ratio exceeded 31%.
ADVANCED ENGINEERING MATERIALS
(2022)
Article
Energy & Fuels
Mohammed Bin Afif, Abdulla Bin Afif, Harry Apostoleris, Krishiv Gandhi, Anup Dadlani, Amal Al Ghaferi, Jan Torgersen, Matteo Chiesa
Summary: The rapidly declining costs of renewable energy technologies have made solar and wind the cheapest sources of energy in many parts of the world. This not only enables the rapid decarbonization of the electricity sector but also reduces the costs of energy-intensive decarbonization efforts in other areas.
Article
Chemistry, Physical
Samuel M. Dull, Olga Vinogradova, Shicheng Xu, David M. Koshy, Per Erik Vullum, Jan Torgersen, Sebastian Kirsch, Venkatasubramanian Viswanathan, Thomas F. Jaramillo, Fritz B. Prinz
Summary: Better oxygen reduction catalysts are needed to improve the efficiency of proton exchange membrane fuel cells. This study prepared high-activity Pt-Zn alloy catalysts using two different synthetic approaches, and evaluated their activity. One approach introduced Zn to Pt nanoparticles via atomic layer deposition, resulting in a 30% increase in the activity per Pt mass. Density functional theory calculations were used to understand the origin of this enhancement and guide the preparation of an alloy with higher Zn content.
ACS APPLIED ENERGY MATERIALS
(2022)
Article
Instruments & Instrumentation
Abdulla Bin Afif, Anup L. Dadlani, Andreas Flaten, Markus Joakim Lid, Johannes Ofstad, Andreas Erbe, Peter Kollensperger, Jan Torgersen
Summary: This paper presents a detailed description of a flexible and portable atomic layer deposition (ALD) system for in situ Fourier transform infrared (FTIR) absorption spectroscopy studies. The system directly integrates with a commercial FTIR spectrometer to reduce complexity and optical losses. The system is validated for tracking the nucleation stage and ligand exchange during ALD growth.
REVIEW OF SCIENTIFIC INSTRUMENTS
(2022)
Article
Materials Science, Multidisciplinary
Kjetil Baglo, Marco Sauermoser, Markus Lid, Thomas Paschke, Abdulla Bin Afif, Markus Lunzer, Andreas Flaten, Martin Steinert, Robert Bock, Jan Torgersen
Summary: The study presents the development of a high temperature acrylic photopolymerizable precursor and a thermal inert-gas treatment to produce architected carbon with low surface to volume ratio structures. The optimized thermal treatment results in dimensionally stable carbon structures with unprecedented feature size variation. These findings have implications for the industrial application of architected carbon materials.
ADVANCED MATERIALS TECHNOLOGIES
(2023)
