Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon

Title
Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 8, Issue 12, Pages 8043-8049
Publisher
American Chemical Society (ACS)
Online
2016-03-22
DOI
10.1021/acsami.6b01927

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