Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up during Sputter-Deposition of Nanoscale Silicide Films

Published 2016 View Full Article

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Title
Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up during Sputter-Deposition of Nanoscale Silicide Films
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 8, Issue 50, Pages 34888-34895
Publisher
American Chemical Society (ACS)
Online
2016-11-22
DOI
10.1021/acsami.6b12413

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