4.8 Article

Fast Fabrication of Sub-200-nm Nanogrooves Using Liquid Crystal Material

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 8, Issue 18, Pages 11851-11856

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.6b01767

Keywords

liquid crystal; nanogrooves; sublimation and recondensation; topographic patterns; alignment layer

Funding

  1. National Research Foundation (NRF)
  2. Korean Government (MSIP) [2014M3C1A3052567, 2015R1A1A1A05000986]

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Self-assembly of soft materials attracts keen interest for patterning applications owing to its ease and spontaneous behavior. We report the fabrication of nano grooves using sublimation and recondensation of liquid crystal (LC) materials. First, well-aligned smectic LC structures are obtained on the micron-scale topographic patterns of the microchannel; then, the sublimation and recondensation process directly produces nanogrooves having sub-200-nm scale: The entire process can be completed in less than 30 min. After it is replicated using an ultraviolet-curable polymer, our platform can be used as an alignment layer to control other guest LC materials.

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