Native Oxide Transport and Removal During Atomic Layer Deposition of TiO2 Films on GaAs(100) Surfaces

Published 2016 View Full Article

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Title
Native Oxide Transport and Removal During Atomic Layer Deposition of TiO2 Films on GaAs(100) Surfaces
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 8, Issue 3, Pages 1667-1675
Publisher
American Chemical Society (ACS)
Online
2016-01-08
DOI
10.1021/acsami.5b08998

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