4.8 Article

High Stability Induced by the TiN/Ti Interlayer in Three-Dimensional Si/Ge Nanorod Arrays as Anode in Micro Lithium Ion Battery

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 8, Issue 12, Pages 7806-7810

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.5b12883

Keywords

Li-ion micro battery; 3D STTG anodes; TiN/Ti interlayer; activation; stable cycling

Funding

  1. National Basic Research Program of China [2015CB932301]
  2. Science and Technology Project of Fujian Province [2013H0046]
  3. State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University) [sklms2015005]
  4. CSC (China Scholarship Council)

Ask authors/readers for more resources

Three-dimensional (3D) Si/Ge-based micro/nano batteries are promising lab-on-chip power supply sources because of the good process compatibility with integrated circuits and Micro/Nano-Electro-Mechanical System technologies. In this work, the effective interlayer of TiN/Ti thin films were introduced to coat around the 3D Si nanorod (NR) arrays before the amorphous Ge layer deposition as anode in micro/nano lithium ion batteries, thus the superior cycling stability was realized by reason for the restriction of Si activation in this unique 3D matchlike Si/TiN/Ti/Ge NR array electrode. Moreover, the volume expansion properties after the repeated lithium-ion insertion/extraction were experimentally investigated to evidence the superior stability of this unique multilayered Si composite electrode. The demonstration of this wafer-scale, cost-effective, and Si-compatible fabrication for anodes in Li-ion micro/nano batteries provides new routes to configurate more efficient 3D energy storage systems for micro/nano smart semiconductor devices.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.8
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Engineering, Electrical & Electronic

A 36-Channel Auto-Calibrated Front-End ASIC for a pMUT-Based Miniaturized 3-D Ultrasound System

Jihee Lee, Kyoung-Rog Lee, Benjamin E. Eovino, Jeong Hoan Park, Luna Yue Liang, Liwei Lin, Hoi-Jun Yoo, Jerald Yoo

Summary: The ASIC presented in this study is a high-efficiency solution for a miniaturized 3D ultrasound system, featuring a charge-recycling high-voltage transmitter and a dynamic-bit-shared analog-to-digital converter. It achieves low power consumption, calibration function, and adaptive gain control, making it suitable for applications like 3D ultrasound imaging.

IEEE JOURNAL OF SOLID-STATE CIRCUITS (2021)

Article Chemistry, Multidisciplinary

Facile Fabrication of Multilayer Stretchable Electronics via a Two-mode Mechanical Cutting Process

Renxiao Xu, Peisheng He, Guangchen Lan, Kamyar Behrouzi, Yande Peng, Dongkai Wang, Tao Jiang, Ashley Lee, Yu Long, Liwei Lin

Summary: A time- and cost-effective fabrication methodology for multilayer stretchable electronics has been developed using a two-mode mechanical cutting process. This method allows for the creation of complex patterns without using conventional photolithography-based processes, resulting in excellent electronic performances of the devices even after repetitive large deformations.

ACS NANO (2022)

Article Chemistry, Multidisciplinary

Programmable Tactile Feedback Patterns for Cognitive Assistance by Flexible Electret Actuators

Tao Jiang, Wenying Qiu, Zhaoyang Li, Xing Ye, Yuhan Liu, Yushi Li, Xiaohao Wang, Junwen Zhong, Xiang Qian, Liwei Lin

Summary: The study utilized a flexible actuator system to achieve basic tactile feedback functions and generate output forces, developed programmable tactile sensation patterns, and demonstrated tactile-assisted navigation and tactile-based braille prototypes, showcasing potential applications in cognitive assistance through tactile feedbacks.

ADVANCED FUNCTIONAL MATERIALS (2022)

Article Engineering, Multidisciplinary

Soft magnetic composites for highly deformable actuators by four-dimensional electrohydrodynamic printing

Zhongbao Wang, Yigen Wu, Dezhi Wu, Daoheng Sun, Liwei Lin

Summary: The study utilized an advanced printing process to deposit soft magnetic composites in an orderly manner, creating deformable actuators with fast response, untethered control, and harmless human-machine interactions under low-strength magnetic fields. By controlling the magnetic polarities of microparticles and utilizing the microscale Weissenberg effect (MWE) through a rotating needle, the research effectively delivered the high viscosity magnetic composites ink.

COMPOSITES PART B-ENGINEERING (2022)

Article Chemistry, Analytical

Single Red Blood Cell Hydrodynamic Traps via the Generative Design

Georgii Grigorev, Nikolay O. Nikitin, Alexander Hvatov, Anna Kalyuzhnaya, Alexander Lebedev, Xiaohao Wang, Xiang Qian, Georgii Maksimov, Liwei Lin

Summary: This paper presents a generative design methodology for a micro hydrodynamic single-RBC trap, aiming to improve the through-slit flowrates for effective cell trapping in microfluidics-based single-cell analysis. The design, validated with experimental data, utilizes an evolutionary algorithm to generate optimized L-shaped trapping slits, leading to increased flow velocities and improved trapping efficiency for cells of various sizes.

MICROMACHINES (2022)

Article Nanoscience & Nanotechnology

Mapping and Simultaneous Detection of Arterial and Venous Pulses using Large-Scale High-Density Flexible Piezoelectret Sensor Array

Liuyang Han, Wei Zeng, Ying Dong, Xiaohao Wang, Liwei Lin

Summary: This study presents a high-density and large-scale flexible pressure sensor array for mapping and detecting arterial and venous pulses simultaneously. The experimental results show that this system can acquire detailed information about both arterial and venous pulses simultaneously, indicating its wide range of potential applications.

ADVANCED ELECTRONIC MATERIALS (2022)

Article Nanoscience & Nanotechnology

Deep learning for non-parameterized MEMS structural design

Ruiqi Guo, Fanping Sui, Wei Yue, Zekai Wang, Sedat Pala, Kunying Li, Renxiao Xu, Liwei Lin

Summary: The geometric designs of MEMS devices play a crucial role in their physical properties and performance. This paper proposes the use of deep learning techniques to accelerate the MEMS design cycle by accurately predicting the physical properties of multiple design candidates with different geometric features. By representing the design candidates using pixelated black-and-white images and training a deep neural network, the physical properties of interest can be quickly calculated without traditional numerical tools. This approach significantly reduces computation time and promotes experience-free and data-driven MEMS structural designs.

MICROSYSTEMS & NANOENGINEERING (2022)

Article Chemistry, Multidisciplinary

Air Permeable Vibrotactile Actuators for Wearable Wireless Haptics

Zhaoyang Li, Yuan Ma, Kaijun Zhang, Jun Wan, Dazhe Zhao, Yucong Pi, Gangjin Chen, Jiangfeng Zhang, Wei Tang, Liwei Lin, Junwen Zhong

Summary: The paper introduces a wearable vibrotactile actuator that can generate mechanical stimulation on the human skin for various human-machine interaction applications. The actuator is characterized by excellent air permeability, low preload requirements, high output sensitivity, and good mechanical durability. Demonstrations include a wireless haptic feedback glove and large size actuators providing tactile feedback for English characters and parts of the human body. The proposed system opens up new possibilities for applications in metaverse, teleoperation, smart textiles, and robotics.

ADVANCED FUNCTIONAL MATERIALS (2023)

Article Engineering, Electrical & Electronic

An Ultrasound Imaging System With On-Chip Per-Voxel RX Beamfocusing for Real-Time Drone Applications

Liuhao Wu, Jiaqi Guo, Rucheng Jiang, Yande Peng, Han Wu, Jiamin Li, Yang Luo, Liwei Lin, Jerald Yoo

Summary: The article discusses the solution to the 3D depth sensing problem in drone vision and navigation. By developing a UIS ASIC with a specific image reconstruction scheme and design, real-time wireless 3D image streaming under different conditions has been successfully achieved.

IEEE JOURNAL OF SOLID-STATE CIRCUITS (2022)

Proceedings Paper Engineering, Electrical & Electronic

A HIGH SEEBECK COEFFICIENT THERMOELECTRIC GENERATOR BASED ON A SELF-HEALING IONOGEL

Yu Long, Peisheng He, Yande Peng, Liwei Lin

Summary: In this research, a thermoelectric energy harvester based on an ion-conductive ionogel is presented, which exhibits self-healing capability, ultrahigh Seebeck coefficient, and stable performance. It has the potential to convert the temperature differences between the human body/skin and the environment into electricity.

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) (2022)

Article Materials Science, Multidisciplinary

Deep Reinforcement Learning for Digital Materials Design

Fanping Sui, Ruiqi Guo, Zhizhou Zhang, Grace X. Gu, Liwei Lin

Summary: This paper introduces the concept of digital materials and their application in composite material design. Through a deep reinforcement learning scheme, an automated process for digital material design is achieved, resulting in improved design quality and significant computational advantages.

ACS MATERIALS LETTERS (2021)

Proceedings Paper Engineering, Electrical & Electronic

ACCELERATING MEMS DESIGN PROCESS THROUGH MACHINE LEARNING FROM PIXELATED BINARY IMAGES

Ruiqi Guo, Renxiao Xu, Zekai Wang, Fanping Sui, Liwei Lin

Summary: Machine learning is used to accelerate the MEMS design process by training neural networks on pixelated binary 2D images of candidate designs. The neural network can quickly and accurately identify vibrational modes and calculate frequencies, outperforming common FEA software by a factor of 4000 with a high accuracy of around 98%. The method is demonstrated using circular disk resonators as an example, showcasing the efficiency and effectiveness of the approach.

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)

Proceedings Paper Engineering, Electrical & Electronic

A MULTIMODAL SELF-HEALING FLEXIBLE SWEAT SENSOR FOR HEALTHCARE MONITORING

Peisheng He, Yande Peng, Liwei Lin

Summary: This study presents a self-healable, flexible, and multimodal sweat sensor capable of detecting important indicators for skin and metabolic disorders. It maintains sensitivity under large strain and can recover conductivity and sensitivity through self-healing, making it suitable for wearable health monitoring systems that often encounter accidental damages.

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)

Proceedings Paper Engineering, Electrical & Electronic

IMPROVED RING-DOWN TIME AND AXIAL RESOLUTION OF PMUTS VIA A PHASE-SHIFT EXCITATION SCHEME

Sedat Pala, Zhichun Shao, Yande Peng, Liwei Lin

Summary: A phase-shift cancellation scheme has been proposed to reduce the ring down period of ultrasonic transducers and increase axial resolutions. Experimental results demonstrate that this scheme effectively shortens the ring down period and improves axial distance sensing resolution for both single elements and arrays.

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)

Proceedings Paper Engineering, Electrical & Electronic

ULTRASOND-INDUCED HAPTIC SENSATIONS VIA PMUTS

Sedat Pala, Zhichun Shao, Yande Peng, Liwei Lin

Summary: This study demonstrates the use of non-contact ultrasonic waves for delivering tactile sensations through a dual-electrode bimorph piezoelectric micromachined transducer. Experimental results show that the best tactile sensation on human fingers is achieved when simulating 100 Hz signals with high frequency ultrasonic waves, and strong haptic sensations are reported up to 10 cm away from the transducers.

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)

No Data Available