Fabrication of precise micro-holes on quartz substrates with improved aspect ratio using a constant velocity-feed drilling technique of an ECDM process

Title
Fabrication of precise micro-holes on quartz substrates with improved aspect ratio using a constant velocity-feed drilling technique of an ECDM process
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 28, Issue 12, Pages 125009
Publisher
IOP Publishing
Online
2018-10-18
DOI
10.1088/1361-6439/aae8f5

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