Hybrid Laser Scribing and Chemical Etching Technique using Pulsed Nd³+:YAG Laser to Fabricate Controlled Micro Channel Profile

Title
Hybrid Laser Scribing and Chemical Etching Technique using Pulsed Nd³+:YAG Laser to Fabricate Controlled Micro Channel Profile
Authors
Keywords
-
Journal
Journal of Laser Micro Nanoengineering
Volume -, Issue -, Pages -
Publisher
Japan Laser Processing Society
Online
2018-12-20
DOI
10.2961/jlmn.2018.03.0002

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