Alloying during local droplet etching of AlGaAs surfaces with aluminium

Title
Alloying during local droplet etching of AlGaAs surfaces with aluminium
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 125, Issue 2, Pages 025306
Publisher
AIP Publishing
Online
2019-01-15
DOI
10.1063/1.5053464

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