Surface Characteristics of MoNxThin Films Obtained by Reactive rf Magnetron Sputtering in UHV System

Title
Surface Characteristics of MoNxThin Films Obtained by Reactive rf Magnetron Sputtering in UHV System
Authors
Keywords
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Journal
BULLETIN OF THE KOREAN CHEMICAL SOCIETY
Volume 36, Issue 10, Pages 2446-2450
Publisher
Wiley
Online
2015-09-03
DOI
10.1002/bkcs.10470

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