Structural alteration induced by substrate bias voltage variation in diamond-like carbon films fabricated by unbalanced magnetron sputtering

Published 2018 View Full Article

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Title
Structural alteration induced by substrate bias voltage variation in diamond-like carbon films fabricated by unbalanced magnetron sputtering
Authors
Keywords
Diamond like carbon, Thin films, Unbalanced magnetron sputtering, Structure, Spectroscopy
Journal
DIAMOND AND RELATED MATERIALS
Volume 90, Issue -, Pages 214-220
Publisher
Elsevier BV
Online
2018-10-27
DOI
10.1016/j.diamond.2018.10.019

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