Rapid nanofabrication via UV-assisted selective etching on GaAs without templates

Published 2019 View Full Article

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Title
Rapid nanofabrication via UV-assisted selective etching on GaAs without templates
Authors
Keywords
Nanofabrication, Selective etching, Optical structures, GaAs
Journal
CHEMICAL PHYSICS LETTERS
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-01-20
DOI
10.1016/j.cplett.2019.01.007

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