Air Damping Analysis in Comb Microaccelerometer

Published 2014 View Full Article

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Title
Air Damping Analysis in Comb Microaccelerometer
Authors
Keywords
-
Journal
Advances in Mechanical Engineering
Volume 6, Issue -, Pages 373172
Publisher
SAGE Publications
Online
2014-04-08
DOI
10.1155/2014/373172
References
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