Semiconductor Logic Technology Innovation to Achieve Sub-10 nm Manufacturing

Published 2013 View Full Article

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Title
Semiconductor Logic Technology Innovation to Achieve Sub-10 nm Manufacturing
Authors
Keywords
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Journal
IEEE Journal of the Electron Devices Society
Volume 1, Issue 3, Pages 66-75
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-06-28
DOI
10.1109/jeds.2013.2271582

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