A case for 2-body material removal in prime LED sapphire substrate lapping and polishing

Title
A case for 2-body material removal in prime LED sapphire substrate lapping and polishing
Authors
Keywords
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Journal
Journal of Manufacturing Processes
Volume 15, Issue 3, Pages 348-354
Publisher
Elsevier BV
Online
2013-01-24
DOI
10.1016/j.jmapro.2012.11.005

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