Journal
JOURNAL OF APPLIED CRYSTALLOGRAPHY
Volume 47, Issue -, Pages 1614-1625Publisher
INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S1600576714016392
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Funding
- Russian Foundation for Basic Research [12-07-00745-a, 13-02-00272-a]
- Presidium of the Russian Academy of Sciences [12-P-1-1014]
- Ural Branch of the Russian Academy of Sciences [12-U-1-1010]
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X-ray reciprocal space mapping was used for quantitative investigation of porous layers in indium phosphide. A new theoretical model in the frame of the statistical dynamical theory for cylindrical pores was developed and applied for numerical data evaluation. The analysis of reciprocal space maps provided comprehensive information on a wide range of the porous layer parameters, for example, layer thickness and porosity, orientation, and correlation length of segmented pore structures. The results are in a good agreement with scanning electron microscopy data. (C) 2014 International Union of Crystallography
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