Optical contrast determination of the thickness of SiO 2 film on Si substrate partially covered by two-dimensional crystal flakes

Published 2015 View Full Article

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Title
Optical contrast determination of the thickness of SiO 2 film on Si substrate partially covered by two-dimensional crystal flakes
Authors
Keywords
Dielectric substrate, Thickness, 2-D crystal flakes, Optical contrast, Numerical aperture
Journal
Science Bulletin
Volume 60, Issue 8, Pages 806-811
Publisher
Elsevier BV
Online
2015-04-02
DOI
10.1007/s11434-015-0774-3

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