Surface morphology of titanium nitride thin films synthesized by DC reactive magnetron sputtering

Published 2015 View Full Article

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Title
Surface morphology of titanium nitride thin films synthesized by DC reactive magnetron sputtering
Authors
Keywords
-
Journal
MATERIALS SCIENCE-POLAND
Volume 33, Issue 1, Pages 137-143
Publisher
Walter de Gruyter GmbH
Online
2018-05-03
DOI
10.1515/msp-2015-0010

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