Full elastic strain and stress tensor measurements from individual dislocation cells in copper through-Si vias

Title
Full elastic strain and stress tensor measurements from individual dislocation cells in copper through-Si vias
Authors
Keywords
-
Journal
IUCrJ
Volume 2, Issue 6, Pages 635-642
Publisher
International Union of Crystallography (IUCr)
Online
2015-09-29
DOI
10.1107/s2052252515015031

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