Effects of starting powder and thermal treatment on the aerosol deposited BaTiO3 thin films toward less leakage currents

Published 2014 View Full Article

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Title
Effects of starting powder and thermal treatment on the aerosol deposited BaTiO3 thin films toward less leakage currents
Authors
Keywords
Sulfur hexafluoride, Post-annealing treatment, Inductively coupled plasma etching, Barium titanate
Journal
Nanoscale Research Letters
Volume 9, Issue 1, Pages 435
Publisher
Springer Nature
Online
2014-08-27
DOI
10.1186/1556-276x-9-435

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