Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography

Published 2013 View Full Article

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Title
Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography
Authors
Keywords
Scanning probe lithography, Nanocrystalline graphite, Dry etching mask
Journal
Nanoscale Research Letters
Volume 8, Issue 1, Pages 75
Publisher
Springer Nature
Online
2013-02-13
DOI
10.1186/1556-276x-8-75
References
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