Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles

Published 2012 View Full Article

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Title
Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles
Authors
Keywords
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Journal
Nanoscale Research Letters
Volume 7, Issue 1, Pages 211
Publisher
Springer Nature
Online
2012-04-11
DOI
10.1186/1556-276x-7-211

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