Freestanding HfO2 grating fabricated by fast atom beam etching

Published 2011 View Full Article

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Title
Freestanding HfO2 grating fabricated by fast atom beam etching
Authors
Keywords
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Journal
Nanoscale Research Letters
Volume 6, Issue 1, Pages 367
Publisher
Springer Nature
Online
2011-04-29
DOI
10.1186/1556-276x-6-367
References
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