Near-surface processing on AlGaN/GaN heterostructures: a nanoscale electrical and structural characterization

Published 2011 View Full Article

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Title
Near-surface processing on AlGaN/GaN heterostructures: a nanoscale electrical and structural characterization
Authors
Keywords
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Journal
Nanoscale Research Letters
Volume 6, Issue 1, Pages 132
Publisher
Springer Nature
Online
2011-02-12
DOI
10.1186/1556-276x-6-132

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