Effect of annealing treatments on photoluminescence and charge storage mechanism in silicon-rich SiNx:H films

Published 2011 View Full Article

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Title
Effect of annealing treatments on photoluminescence and charge storage mechanism in silicon-rich SiNx:H films
Authors
Keywords
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Journal
Nanoscale Research Letters
Volume 6, Issue 1, Pages 178
Publisher
Springer Nature
Online
2011-03-02
DOI
10.1186/1556-276x-6-178

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