4.6 Article

A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column

Journal

MICROMACHINES
Volume 9, Issue 8, Pages -

Publisher

MDPI
DOI: 10.3390/mi9080408

Keywords

packed gas chromatographic column; metal-oxide-semiconductor array sensor; sensitive material; environmental monitoring

Funding

  1. National Key Research and Development Program of China [2016YFC07006]
  2. National Science Foundation of China [61874121, 61774157, 61802363, 11574219, 61176112]

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In this work, a mini monitoring system integrated with a microfabricated metal oxide array sensor and a micro packed gas chromatographic (GC) column was developed for monitoring environmental gases. The microfabricated packed GC column with a 1.6 m length was used to separate the environmental gas, and the metal oxide semiconductor (MOS) array sensor, fabricated with nano-sized SnO-SnO2 sensitive materials, was able to effectively detect each component separated by GC column. The results demonstrate that the monitoring system can detect environmental gas with high precision.

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