Journal
MICROMACHINES
Volume 5, Issue 3, Pages 766-782Publisher
MDPI
DOI: 10.3390/mi5030766
Keywords
dielectrophoresis; micromolding; pyrolysis; epoxy; shrinkage; tapered; polymer substrate; grayscale; high aspect ratio; microfluidics
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The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography is chosen due to its resolution and reproducibility. Here, a number of improvements to traditional photolithography are introduced to increase the versatility of the process. The shrinkage of SU-8 during carbonization is then detailed as one of the guidelines necessary to design carbon patterns. A couple of applications-(1) carbon-electrode dielectrophoresis for bioparticle manipulation; and (2) the use of carbon structures as micro-molds are also presented.
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