Journal
MICROMACHINES
Volume 5, Issue 2, Pages 325-340Publisher
MDPI
DOI: 10.3390/mi5020325
Keywords
fabrication techniques; lithography; microlens; polymer; UV curing; hybrid integration
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Funding
- German Federal Ministry of Education and Research (BMBF)
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A series of technological steps concentrating around photolithography and UV polymer on glass replication in a mask-aligner that allow for the cost-effective generation of rather complex micro-optical systems on the wafer level are discussed. In this approach, optical functional surfaces are aligned to each other and stacked on top of each other at a desired axial distance. They can consist of lenses, achromatic doublets, regular or chirped lens arrays, diffractive elements, apertures, filter structures, reflecting layers, polarizers, etc. The suitability of the separated modules in certain imaging and non-imaging applications will be shown.
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