A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing

Published 2012 View Full Article

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Title
A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing
Authors
Keywords
-
Journal
Micromachines
Volume 3, Issue 2, Pages 379-395
Publisher
MDPI AG
Online
2012-04-27
DOI
10.3390/mi3020379

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