Influence of the Mobility of Pt Nanoparticles on the Anisotropic Etching Properties of Silicon

Published 2012 View Full Article

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Title
Influence of the Mobility of Pt Nanoparticles on the Anisotropic Etching Properties of Silicon
Authors
Keywords
-
Journal
ECS Solid State Letters
Volume 2, Issue 2, Pages P22-P24
Publisher
The Electrochemical Society
Online
2012-12-07
DOI
10.1149/2.010302ssl

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