Wet-Etch Method for Patterning Metal Electrodes Directly on Amorphous Oxide Semiconductor Films

Published 2012 View Full Article

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Title
Wet-Etch Method for Patterning Metal Electrodes Directly on Amorphous Oxide Semiconductor Films
Authors
Keywords
-
Journal
ECS Solid State Letters
Volume 1, Issue 5, Pages P82-P84
Publisher
The Electrochemical Society
Online
2012-09-13
DOI
10.1149/2.002206ssl

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