Properties of H+Implanted 4H-SiC as Related to Exfoliation of Thin Crystalline Films

Published 2014 View Full Article

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Title
Properties of H+Implanted 4H-SiC as Related to Exfoliation of Thin Crystalline Films
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 3, Issue 3, Pages P37-P42
Publisher
The Electrochemical Society
Online
2014-01-19
DOI
10.1149/2.001404jss
References
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