Surface Planarization of GaN-on-Sapphire Template by Chemical Mechanical Polishing for Subsequent GaN Homoepitaxy

Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

(2012) Hideo Aida et al.   CURRENT APPLIED PHYSICS

Reduction of Bowing in GaN-on-Sapphire and GaN-on-Silicon Substrates by Stress Implantation by Internally Focused Laser Processing

(2012) Hideo Aida et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Accurate Determination of Dislocation Density in GaN Using Chemical Mechanical Polishing

(2012) Purushottam Kumar et al.   ECS Journal of Solid State Science and Technology

Chemical Mechanical Polishing of Gallium Nitride with Colloidal Silica

(2011) Hideo Aida et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Selective etching of dislocations in GaN grown by low-pressure solution growth

(2010) I.Y. Knoke et al.   JOURNAL OF CRYSTAL GROWTH

Lateral epitaxial overgrowth of (0001) AlN on patterned sapphire using hydride vapor phase epitaxy

(2009) Scott A. Newman et al.   APPLIED PHYSICS LETTERS