Study of Conduction Modes of Time to Dielectric Breakdown Reliability in Cu Damascene Structures

Published 2013 View Full Article

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Title
Study of Conduction Modes of Time to Dielectric Breakdown Reliability in Cu Damascene Structures
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 2, Issue 11, Pages N217-N221
Publisher
The Electrochemical Society
Online
2013-09-12
DOI
10.1149/2.023311jss
References
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