Dissolution of CF-Polymer Films at Ultra Low-k Surfaces Using Diluted HF

Published 2012 View Full Article

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Title
Dissolution of CF-Polymer Films at Ultra Low-k Surfaces Using Diluted HF
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 1, Issue 1, Pages N14-N17
Publisher
The Electrochemical Society
Online
2012-08-01
DOI
10.1149/2.007201jss
References
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