Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect

Published 2013 View Full Article

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Title
Cs-Corrected STEM Observation and Atomic Modeling of Grain Boundary Impurities of Very Narrow Cu Interconnect
Authors
Keywords
-
Journal
ECS Electrochemistry Letters
Volume 2, Issue 6, Pages H23-H25
Publisher
The Electrochemical Society
Online
2013-03-10
DOI
10.1149/2.001306eel

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