Silicon carbonitride layers deposited on titanium and polyurethane by PACVD method

Published 2013 View Full Article

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Title
Silicon carbonitride layers deposited on titanium and polyurethane by PACVD method
Authors
Keywords
PACVD, silicon carbonitride layers, tribology
Journal
materials science-poland
Volume 31, Issue 3, Pages 476-483
Publisher
Walter de Gruyter GmbH
Online
2013-08-28
DOI
10.2478/s13536-013-0127-3
References
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