Effect of initial deflection of diamond wire on thickness variation of sapphire wafer in multi-wire saw

Title
Effect of initial deflection of diamond wire on thickness variation of sapphire wafer in multi-wire saw
Authors
Keywords
Diamond wire, Multi wire saw, Sapphire wafer, Total thickness variation, Wire deflection
Publisher
Springer Nature
Online
2015-04-12
DOI
10.1007/s40684-015-0015-x

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